VARISTORS, WHICH OBTAINED FROM CERAMIC POWDERS SiC AND Si3N4 , BY MEANS OF LASER RADIATION

Abstract

The process of obtaining of powders of silicon carbide SiC and silicon nitride Si3N4 by means of irradiation of CO2-laser has been considered. The technology differs by that the used in process of fabrication reagent gases – silane SiH4 and ammonia NH3 (for silicon nitride) or ethylene С2H4 (for silicon carbide) are passed through the CO2-laser beam. The finely-dispersed, mono-dispersed (which contain spherical particles of the same size), high purity, not agglomerated powders of SiC and Si3N4 have been obtained. The ceramic, obtained from such powders, has a minimum vacuities as the result of a monodispersity and a regular shape of corpuscles of powders. The varistors made of a powders with application of laser treatment, have higher protective properties.